Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12358/25881
Title | A spectroscopic ellipsometer using rotating polarizer and analyzer at a speed ratio 1: 1 and a compensator |
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Untitled | |
Abstract |
Ellipsometers have been widely used in thin film characterization. They have shown a high degree of accuracy. We here propose theoretically a rotating polarizer and analyzer ellipsometer at a speed ratio 1:1 with a fixed compensator placed just after the rotating polarizer. Our calculations of the optical properties of c-Si and SiO reveal a substantial decrease in the percent error due to the fixed compensator. The uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are presented in details. |
Type | Journal Article |
Date | 2014 |
Published in | Optical and Quantum Electronics |
Series | Volume: 46, Number: 7 |
Publisher | Springer US |
Citation | |
Item link | Item Link |
License | ![]() |
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