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http://hdl.handle.net/20.500.12358/25848
TitleRotating polarizer, compensator, and analyzer ellipsometry
Untitled
Abstract

In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N 1 ω: N 2 ω: N 3 ω. Different ellipsometric configurations can be obtained by giving different integral values to N 1, N 2, and N 3. All configurations are applied to bulk c-Si and GaAs to calculate the real and imaginary parts of the refractive index of the samples. The accuracies of all ellipsometric configurations are investigated in the presence of a hypothetical noise and with small misalignments of the optical elements. Moreover, the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are studied. The comparison among different configurations reveals that the rotating compensator—analyzer configuration corresponds to the minimum error in the calculated optical parameters.

Authors
Taya, Sofyan A.
El-Agez, Taher M.
Alkanoo, Anas A
TypeJournal Article
Date2013
Subjects
ellipsometry
polarizer
analyzer
compensator pacs: 0760fs
Published inChinese Physics B
SeriesVolume: 22, Number: 12
PublisherIOP Publishing
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  • Staff Publications- Faculty of Science [1030]
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The institutional repository of the Islamic University of Gaza was established as part of the ROMOR project that has been co-funded with support from the European Commission under the ERASMUS + European programme. This publication reflects the views only of the author, and the Commission cannot be held responsible for any use which may be made of the information contained therein.

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The institutional repository of the Islamic University of Gaza was established as part of the ROMOR project that has been co-funded with support from the European Commission under the ERASMUS + European programme. This publication reflects the views only of the author, and the Commission cannot be held responsible for any use which may be made of the information contained therein.

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