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http://hdl.handle.net/20.500.12358/25804
TitleEffect of noise on the optical parameters extracted from different ellipsometric configurations
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Abstract

We compare different types of spectroscopic ellipsometric structures concerning the effect of noise on the optical parameters extracted from these systems. The comparison involves the rotating analyzer spectroscopic ellipsometer and the rotating polarizer and analyzer (RPA) spectroscopic ellipsometer in which the polarizer and the analyzer rotate with different speed ratios. All systems being compared are investigated for c-Si and GaAs samples for a noisy signal. The percentage error in the real and imaginary parts of the refractive index of the samples is calculated and plotted with photon energy in the range 15–3 eV. The results reveal that the RPA spectroscopic ellipsometer in which the polarizer and the analyzer rotate with a 1: 1 ratio corresponds to minimum error.

Authors
Taya, Sofyan A.
El-Agez, Taher M.
TypeJournal Article
Date2012
Published inPhysica Scripta
SeriesVolume: 85, Number: 4
PublisherIOP Publishing
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  • Staff Publications- Faculty of Science [1030]
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The institutional repository of the Islamic University of Gaza was established as part of the ROMOR project that has been co-funded with support from the European Commission under the ERASMUS + European programme. This publication reflects the views only of the author, and the Commission cannot be held responsible for any use which may be made of the information contained therein.

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The institutional repository of the Islamic University of Gaza was established as part of the ROMOR project that has been co-funded with support from the European Commission under the ERASMUS + European programme. This publication reflects the views only of the author, and the Commission cannot be held responsible for any use which may be made of the information contained therein.

Contact Us | Send Feedback