Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12358/25772
| Title | Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry |
|---|---|
| Untitled | |
| Abstract |
Oxygen-treated trimethylsilane (TMS) plasma-polymerized films are investigated using rotating polarizer and analyzer ellipsometer. Aging process and composition of the samples are studied. Coordinated X-ray photoelectron spectroscopy (XPS) depth profiling studies on these films is presented for more detailed understanding of the aging process as well as the modeling of these films. |
| Type | Journal Article |
| Date | 2011 |
| Published in | Journal of Atomic, Molecular, and Optical Physics |
| Series | Volume: 2011 |
| Publisher | Hindawi Publishing Corporation |
| Citation | |
| Item link | Item Link |
| License |  |
| Collections | |
| Files in this item | ||
|---|---|---|
| Taya, Sofyan A._56.pdf | 667.3Kb | |
