Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12358/25772
Title | Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry |
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Untitled | |
Abstract |
Oxygen-treated trimethylsilane (TMS) plasma-polymerized films are investigated using rotating polarizer and analyzer ellipsometer. Aging process and composition of the samples are studied. Coordinated X-ray photoelectron spectroscopy (XPS) depth profiling studies on these films is presented for more detailed understanding of the aging process as well as the modeling of these films. |
Type | Journal Article |
Date | 2011 |
Published in | Journal of Atomic, Molecular, and Optical Physics |
Series | Volume: 2011 |
Publisher | Hindawi Publishing Corporation |
Citation | |
Item link | Item Link |
License | ![]() |
Collections | |
Files in this item | ||
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Taya, Sofyan A._56.pdf | 667.3Kb |