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|Title||Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry|
Oxygen-treated trimethylsilane (TMS) plasma-polymerized films are investigated using rotating polarizer and analyzer ellipsometer. Aging process and composition of the samples are studied. Coordinated X-ray photoelectron spectroscopy (XPS) depth profiling studies on these films is presented for more detailed understanding of the aging process as well as the modeling of these films.
|Published in||Journal of Atomic, Molecular, and Optical Physics|
|Publisher||Hindawi Publishing Corporation|
|Item link||Item Link|
|Files in this item|
|Taya, Sofyan A._56.pdf||667.3Kb|