A micromachined WR-3 band waveguide diplexer based on coupled resonator structures

Abstract

A novel micromachined coupled-resonator waveguide diplexer operating in frequency range 220-325 GHz is presented. The diplexer has been synthesised using coupling matrix optimization of multiple coupled resonators, and constructed with innovative structure using micromachining technology. The diplexer structure consists of waveguide cavity resonators, waveguide extensions, and embedded bends, and it has been made of four layers of metal coated SU-8. The diplexer structure allows accurate alignment and secure connection with the flanges of waveguide test ports and matched loads.